作　　者： (魏榕山）; (黄海舟）;

机构地区： 福州大学物理与信息工程学院,福建福州350116

出　　处： 《中国集成电路》 2017年第8期42-45,48,共5页

摘　　要： 基于斩波技术和开关电容结构,研究并设计一款用于MEMS压力传感器的低噪声、高精度读出芯片。在经典三运放结构的基础上增加了斩波开关,并在传统自调零结构上进行改进,引入一种开关电容滤波器,实现对失调电压的消除。采用SMIC 0.18μm CMOS工艺,对所设计的电路进行仿真验证。仿真结果表明,在不同增益情况下,输出端的增益误差均小于0.1%;在0~650Hz范围内,等效输入噪声小于600nV,满足MEMS压力传感器输出信号的分辨率的要求。 Based on chopping technology and switched-capacitor （ SC ） structure, we proposed a low noise,high pre- cision readout IC for the MEMS pressure sensor.Based on the classical three op-amp structure,chopping was added and an improved traditional auto-zeroing filter that adopts SC was introduced,which was used to the cancellation of the offset. The circuits are verified by SMIC 0.18urn CMOS process. The simulation results showed that the gain error is less than 0.1% in different gain conditions.The input referred noise of the whole circuit was less than 600nV at 0-650Hz,which could satisfy the resolution of the output signal of the MEMS pressure sensor.

关 键 词： 压力传感器 读出电路 失调消除 斩波技术 自调零