作　　者： (李宇东）; (罗坚义）; (莫希伟）; (张园园）; (曾庆光）; (何嘉健）;

机构地区： 五邑大学应用物理与材料学院,广东江门529020

出　　处： 《五邑大学学报（自然科学版）》 2017年第3期31-38,共8页

摘　　要： 由于大多数半导体式酒精气体传感器必须工作在较高温度下才能达到较高灵敏度,导致其在工作过程中存在安全隐患,不利于工业化生产及大规模应用.针对上述问题,本文利用热氧化法制备了高比表面积的WO_3纳米花薄膜,并利用磁控溅射法把Pt纳米颗粒均匀地溅射到纳米花表面上,形成Pt表面修饰WO_3纳米花薄膜.通过酒精气体传感测试平台测定了该材料制备的酒精气体传感器的性能,并对Pt表面修饰WO_3纳米花薄膜的酒精气敏机理进行讨论.结果表明,在低工作温度下(60 ℃),Pt表面修饰WO_3纳米花薄膜的呼气酒精质量浓度检测范围为20~500 mg/L,该范围已接近酒后驾驶的呼气酒精质量浓度标准,并有效降低了酒精气体传感器的工作温度,解决了使用中存在的安全隐患. Most semiconductor alcohol gas sensors must operate at a high temperature to achieve high sensitivity, resulting in security risks during the operation of an alcohol gas sensor, which was detrimental to industrialization of production and large-scale application. To solve the problem, a WO3 nanoflowers film with a high specific surface area was prepared by a thermal oxidation method in this study. Then the Pt nanoparticles were uniformly sputtered on the surfaces of the nanoflowers to form a Pt-coated WO3 nanoflowers film. A simple test platform was built to test the sensing property of the alcohol gas sensor based on Pt-coated WO3 nanoflower film, and its gas sensing reaction mode were discussed. The experimental result indicated that the alcohol gas sensor was able to detect the breath alcohol concentration in air from 20 to 500 mg/L at relative low temperature （60 ℃）, and the lower limit of the detection drunk-driving. These features alcohol gas sensors and avoid a range can satisfy the breath can also effectively compensate variety of security risks alcohol concentration standards of for the deficiency of semiconductor

关 键 词： 酒精气体传感器 纳米花薄膜 表面修饰 气敏