作　　者： (任芝龙）; (肖娇玉）; (黄佳木）;

机构地区： 重庆大学材料科学与工程学院,重庆400045

出　　处： 《表面技术》 2017年第9期141-146,共6页

摘　　要： 目的了解靶材成分对磁控溅射PTFE薄膜性能的影响,以提升PTFE薄膜疏水性能。方法采用射频磁控溅射技术,在玻璃基片上一步制备了透明超疏水聚四氟乙烯薄膜,并研究了不同PTFE靶材对薄膜的影响。利用X射线光电子能谱仪(XPS)、接触角测试仪(Drop Meter)、紫外-可见分光光度计(UV-Vis)分别对靶材和薄膜的性能进行研究。结果两靶材的氟碳官能团含量有明显差异,且靶材1含有CF2O,靶材2中不含。靶材的成分影响了PTFE的溅射率,靶材1的溅射率为靶材2的2倍。相同溅射时间下,靶材不同的薄膜厚度不同,从而表现出不同的静态水接触角。薄膜的疏水性能与薄膜厚度呈现指数关系,最终稳定在170°水接触角平台。同时,溅射过程中,F离子刻蚀到玻璃基底而引入了Na F,但薄膜中Na F和氟碳基团的含量与靶材成分相关。薄膜中Na F的存在,提升了薄膜的F/C比,降低了薄膜表面能,提升了其疏水性能,但降低了薄膜的可见光透过率。结论一步制备透明超疏水聚四氟乙烯薄膜的技术具有广泛应用前景,了解靶材成分对薄膜性能的影响具有重要指导意义。 The work aims to study effects of target composition on performance of magnetron sputtering PTFE films to en- hance hydrophobicity of PTFE films. Transparent super-hydrophobic polytetrafluoroethylene （PTFE） films were prepared on glass substrate by one-step RF magnetron sputtering, and the effects of different PTFE targets on the films were studied. Proper- ties of the targets and films were investigated by using X-ray photoelectron spectroscopy, Drop Meter and UV.Vis spectropho- tometer. Fluorocarbon functional group content of the two targets were significantly different, and target 1 contained CF20 while target 2 did not, Target composition affected PTFE sputtering rate, that of the target 1 was 2 times as high as that of target 2. The film thickness varied with target provided with the same sputtering time, thus exhibiting different static water contact angles. Film hydrophobicity exhibited an exponential relationship with film thickness, and finally the water contact angle reached a platform of 170~ and no longer rose. Meanwhile, NaF was introduced into the film as glass substrate was etched by F ions dur- ing the sputtering process. However, the content of NaF and fluorocarbon in the film was related to the target composition. The presence of NaF in the film enhanced F/C ratio, reduced surface energy, enhanced hydrophobicity, but declined visible light transmittance of the film. One-step preparation of transparent super-hydrophobic polytetrafluoroethylene film technology has extensive application prospect. Therefore, understanding the effects of target composition on film performance is of important guiding significance.

关 键 词： 磁控溅射 聚四氟乙烯 薄膜 靶材 透光率 超疏水