作　　者： (冯丽爽）; (刘惟芳）; (姚保寅）;

机构地区： 北京航空航天大学微纳测控与低维物理教育部重点实验室

出　　处： 《导航与控制》 2015年第6期70-74,43,共6页

摘　　要： 静电驱动是实现微米光栅加速度计小型化和闭环力反馈控制的关键,其引入的静电刚度对加速度计灵敏度有着重要影响。对基于静电刚度的微米光栅加速度计灵敏度特性进行分析。首先,建立了基于静电刚度的微米光栅加速度计灵敏度模型。其次,通过MATLBA仿真,得到静电驱动电压与传感器灵敏度的理论关系。最后,对理论分析结果进行了实验验证,结果表明静电刚度可以改善系统刚度,静电电压从1.25V到2.05V等间隔变化时,加速度计的灵敏度由871mV/g变化为1148mV/g,分别相对于禾加电时的灵敏度783mV/g提高了0.46dB到1.66dB,提高了微米光栅加速度计的灵敏度。本文研究内容对集成式闭环微米光栅加速度计的研究提供参考。 Electrostatic actuator is the key for the miniaturization and closed loop with force-feedback control of micro-grating accelerometers(MGA).Its electrostatic rigidity markedly affects the MGA sensitivity.In this paper,we analyze the sensitivity of the MGA based on electrostatic rigidity.Firstly,the sensitivity model of the MGA based on electrostatic rigidity is established.Secondly,the theoretical relationship describing the electrostatic voltages and sensor sensitivity is analyzed via MATLAB simulation.Finally,we testify the theoretical analysis through experiment.The result indicates electrostatic rigidity can tailor the system rigidity to improve the sensor sensitivity from 871mV/g to 1148mV/g when the electrostatic voltages change from 1.25 V to 2.05 V.This corresponds the sensitivity improvement from 0.4dB to1.66 dB compared with the sensitivity 781mV/g without electrostatic voltage.This work will provide reference for the integrated micro-grating accelerometers with closed loop control.

关 键 词： 静电刚度 灵敏度 微米光栅 加速度计