作　　者： (连树仁）; (曹慧亮）; (石云波）; (寇志伟）; (冯恒振）; (曾一笑）;

机构地区： 中北大学电子测试技术重点实验室,太原030051

出　　处： 《电子器件》 2017年第4期983-986,共4页

摘　　要： 提出了使用虚拟哥氏力来标定MEMS陀螺仪特性的一种方法,通过利用一系列电压信号来模拟哥氏力和角速率的输入,以获得陀螺仪的频率特性响应。该方法可以分别在开环模式和闭环模式的情况下便捷且高效的测量出陀螺的标度因数等性能指标。同时,该方法可以很容易识别外部角速度的动态响应,增大了传统标定方法的频率范围,避免了利用测试设备标定陀螺所面临的性能局限。并且,该方法还可以用于微机械陀螺的误差校正和故障检测。 A method of using a virtual Coriolis force calibrated silicon micromechanical gyroscope properties is proposed. By using a series of voltage signals to simulate the input of the Coriolis Force and angular velocity to obtain the frequency response characteristics of gyroscopes, this method can be used to measure the scale factor and other performance indicators of the gyroscope conveniently and efficiently in the open loop and closed loop mode. At the same time, the method can easily identify the dynamic response of the external angular velocity, increase the frequency range of the traditional calibration method, and avoid the performance limitation of the gyro. Furthermore, the method can also be applied to the error correction and fault detection of micro machined gyroscope.

关 键 词： 陀螺仪 虚拟哥氏力 自标定 标度因数 力平衡控制