导　　师： 方光荣

学科专业： 080803

授予学位： 硕士

作　　者： ;

机构地区： 中国科学院研究生院

摘　　要： 本论文介绍了扫描电子束曝光机图形发生器的总体方案、系统设计、硬件实现和软 件编程等，提出了一套完整的图形发生器硬件方案，并完成了图形发生器接口的设计。 本论文中的新型图形发生器由接口电路、双端口存储电路、数字信号处理电路、数 模转换电路、曝光／标记检测控制电路、标记检测电路、最终曝光数据寄存器单元和束闸 控制电路构成。 论文研究了TI的通用型浮点数字信号处理器TMS320VC33的功能，根据课题的需 要和DSP处理器的特点及结构，从硬件方面对图形发生器的数字信号处理单元进行了研 究。 通用串行总线是近年来在科研应用中使用比较广泛的产品，大有取代传统串口的趋 势，和以往的接口方式相比，在结构、功能以及调试上都有很大的不同。本论文通过系 统设计和分析，对其功能进行了比较详细的介绍。 论文着重从图形发生器的硬件入手，研究了图形发生器的工作原理以及各个单元的 配合和功能实现。 A whole scheme of a new kind of digital pattern generator of the e-beam lithography system is given, including system function, hardware and software design. This digital pattern generator composes of eight parts: interface circuit unit, dual-port SRAM unit, DSP unit, DAC unit, expose//mark signal detection control unit, mark signal diction unit and final expose shape registers unit. We discuss the Digital Signal Processor /(DSP/), and give many details about TI all-purpose float processor-TMS320VC33 which is the key part of the pattern generator we have designed, and we discuss TMS320VC33's hardware construction and special functions such as Boot Loader. Further research on TMS320VC33 shows that it is reasonable to choose TMS320VC33 as the key chip of this pattern generator. Universal Serial Bus /(USB/) is a type of interfaces which has been widely used in recent years. As a new interface mode, there are many differences in hardware constructions and functions, software design, debug. In this thesis, we introduce hardware and software about USB from the realization of the interface between the pattern generator and the control computer. According to the hardware of the pattern generator, the thesis particularly researches the principle of the system's operation and the realization of the system function.

关 键 词： 电子束曝光机 图形发生器 数字信号处理器 通用串行总线 硬件

分 类 号： [TP332]

领　　域： [自动化与计算机技术] [自动化与计算机技术]