导　　师： 强盛

学科专业： 0811

授予学位： 硕士

作　　者： ;

机构地区： 哈尔滨工业大学

摘　　要： 光刻机是一个涉及精密机械、精密控制、精密测量等多学科的机电一体化的高端精密制造装备，其发展受到光学性能、电机性能、测量分辨率、机械加工能力、控制系统性能等各种条件的制约，设计能够保证光刻机高速高精度的控制器是提升光刻机性能的关键。 掩膜台和硅片台作为光刻机的核心部分，都采用宏微双台气浮结构。永磁直线电机和音圈电机分别为宏微台提供动力，从而实现六自由度运动。为了优化机械结构和验证先进控制方法，需要利用系统辨识的方法获得含有谐振特性的超精密平台模型。 本文分析了精密运动平台的结构，并建立了直线电机和音圈电机的数学模型，进而建立了单自由度宏微耦合运动模型和六自由度力学模型，能够反映多个电机共同作用下的运动特性。理论模型的建立为模型辨识奠定了基础。 数据采集和数据处理是系统辨识的关键环节。对数据采集系统的上位机、下位机和运动控制卡模块进行了定制。在此基础上做了扫频实验，并引入数据插值和滤波方法解决了数据采集过程中出现的粗大误差等问题。又采用相关分析法计算输出信号的幅值和相对于输入信号的相位差，绘制出微动台和宏动台的开环频率特性Bode图。 采用自适应实数编码遗传算法辨识出宏微耦合运动理论模型的未知参数。考虑到机械谐振会对精密运动系统产生较大扰动，建立了机械谐振模型，同时基于递阶辨识原理，得到机械谐振模型中的未知参数。设计陷波器抑制系统的机械谐振，大幅提高了系统的动态响应性能。 精密运动平台模型的有效性已被实验验证，这将给光刻机控制系统的设计和调试带来极大的方便。 Lithography is a high-precision manufacturing equipment of electromechanicalintegration, involving precision machinery, precision control, precision measurementand other subjects. It is limited by the development of optical properties, electricalproperties, measurement resolution, machining capabilities, control performance, etc.The performance of lithography can be improved by the design of controllers that canensure the high speed and high precision. The core devices of lithography is wafer stage and reticle stage, which is composedof coarse and fine motion stage with gas-lubricated bearings. Permanent magnet linearmotor and voice coil motor drive the coarse and fine motion stage respectively, so as toachieve six degrees of freedom motion. For optimizing the mechanical structure andvalidating of advanced control methods, it is necessary to identify the ultra-precisionmotion platform model with resonance characteristics. This dissertation analyzes the structure of precision motion platform and buildsmathematical model of linear motors and voice coil motors, thereby SDOF macro-microcoupling theoretical models and6-DOF mechanical model are established, which canreflect the combined effect of multiple motors motion characteristics. Theoretical modelis the basis of model identification. Data acquisition and data pre-processing are the key links of system identification.Scanning frequencies experiment has been done on the system. Data interpolationalgorithm and filtering method are designed for processing the gross error appearing inthe data. Correlation analysis method is applied to calculate the output signal amplitudeand the phase difference relating to the input signal. The frequency characteristics ofcoarse motion stage and fine motion stage can be reflected by Bode diagrams drawnrespectively. The unknown parameters of the SDOF macro-micro coupling theoretical model areidentified by adaptive real-coded genetic algorithm. Considering the great disturbancegenerated by mechanical resonance, the mechanic

关 键 词： 精密运动平台 参数辨识 自适应遗传算法 递阶辨识 机械谐振

领　　域： [电子电信]