作　　者： ; ; ; ; ; ; ;

机构地区： 复旦大学信息科学与工程学院先进光子学材料与器件国家重点实验室

出　　处： 《红外与毫米波学报》 2003年第3期213-216,共4页

摘　　要： 报道了退火对电子回旋共振 (ECR)辅助脉冲激光溅射方法制备的CNx 薄膜样品光学性质的影响 .X射线衍射(XRD)结果显示CNx 薄膜基本为无定形结构 ,但存在微量的多晶结构 .拉曼散射谱显示所制备的CNx 薄膜样品主要由CN、少量的C—C和微量的CN组成 .随着退火温度的升高 ,拉曼散射谱不但在 135 7cm-1附近出现了一个新峰 (新峰对应无序的CN键 ) ,而且CN和CN的相对含量比随着退火温度的提高大致呈先减小后增大再减小的趋势 ,从而证实在退火过程中部分N原子发生了迁移 .椭偏仪所测量的CNx 薄膜的光学常数表明退火温度对ε1、ε2 、n、k的大小和谱线的形状均产生了显著影响 .结合拉曼散射谱可断定其原因为退火改变了CNx 薄膜样品的内部结构和键结构 .实验中得到的ε1、ε2 、n、k随光子能量的变化关系可用洛伦兹色散理论得到很好解释 . The effect of annealing on optical properties of the CNx films prepared by electron cyclotron resonance laser pulse assisted deposition was reported. X-ray diffraction (XRD) shows that CNx film samples have basically amorphous structure and very little amount of poly-crystalline structures. Raman Scattering spectra demonstrates that the bonds in CNx films prepared at room temperature (RT) are mainly C=N bonds, but a few C-C and minim CdropN bonds. With the annealing temperature increasing, not only appears a new peak corresponding to disordered CN bond near 1357cm(-1) in Raman Scattering spectra, but also the comparable accumulations between C=N and C-N bonds roughly tend to decrease at first, then increase and then decrease again. It proves that partial hydrogen atoms in the samples are migrated or escaped from the samples. The optical constants of CN, film samples measured by scanning ellipsometry demonstrate that annealing has a pronounced effect on epsilon(1), epsilon(2), n, k and spectra shape, which is due to the change of the internal and bonding structures caused by annealing in the light of Raman Scattering spectra. The dependence of epsilon(1), epsilon(2), n and k obtained in experiments on photon energy can be explained by lorentz dispersion theory.

关 键 词： 椭偏光谱 电子回旋共振 反常色散 拉曼散射 退火处理 射线衍射 氮碳薄膜 洛伦兹色散理论

领　　域： [理学] [理学]