作　　者： ; ; ; ; ; ; ; ;

机构地区： 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室

出　　处： 《发光学报》 2004年第2期139-142,共4页

摘　　要： 通过X射线衍射、扫描电子显微镜和变温光致发光光谱对MOCVD方法生长在蓝宝石衬底上的ZnO微米柱材料的结构及发光特性进行了表征。X射线衍射结果表明,ZnO具有良好的c轴择优取向,扫描电子显微镜图中可观察出ZnO微米在呈六角结构生长,半径约为0.5～1.5μm。样品的发光光谱通过He-Cd激光器的325 nm线激发,从光谱中发现低温(81 K)下出现极强的与激子相关的带边发光峰,温度升高到360 K时与自由激子相关的紫外发射峰仍然是清晰可见。 Well-aligned ZnO micro-rods have been prepared on Al_2O_3(0001) substrate by metalorganic chemical va- por deposition (MOCVD) with Zn(C_5H_7O_2)_2 as the reactant source. The crystal quality and optical character of the ZnO were studied. X-ray diffration spectra show that ZnO is strongly c-oriented. The morphology of the sample was obtained by SEM. The images indicated the ZnO micro-rods have hexahedral structure with radius of 0.5 ～ 1. 5μm. A strong ultraviolet (UV) emission is observed at 81 ～ 360 K when sample is excited by 325 nm line of a He-Cd laser. In the photoluminescence (PL) spectra, deep level emission can't be seen, indicating that the micro-rods have higher crystalline guality.

关 键 词： 金属有机化学气相沉积 氧化锌微米柱 射线衍射 扫描电子显微镜 光致发光 半导体材料 禁带宽度

领　　域： [理学] [理学]