作　　者： ; ; ; ;

机构地区： 西安建筑科技大学材料科学与工程学院

出　　处： 《西安建筑科技大学学报（自然科学版）》 2004年第1期109-112,共4页

摘　　要： 铟锡氧化物(ITO)具有一系列的独特性能,近年来引起人门广泛关注.为了把握这一发展趋势,本文结合国际发展背景,首先对近几年来我国在ITO薄膜研究领域的发展状况从结构与机理、薄膜特性以及应用三个方面给予回顾.其次,对今后的发展予以展望. In recent years, Indium tin oxide (ITO) thin films have attracted intensive interest because of their unique characteristics. To seize the opportunity of development, this paper describes the state of investigations of ITO thin films in China. First it reviews the situation in research, structure and mechanism, as well as the special properties of ITO thin films and their applications. Besides, the paper has mapped the prospective for the ITO thin film investigations in the future.

关 键 词： 薄膜 特性 综述

领　　域： [理学] [理学] [理学]