作　　者： ; ; ; ; ;

机构地区： 清华大学机械工程学院精密测试技术及仪器国家重点实验室

出　　处： 《压电与声光》 2004年第1期79-82,共4页

摘　　要： 扫描近场光学显微镜(SNOM)是基于非辐射场的产生和探测,能够实现超衍射极限分辨率的光学成像。但纳米精度的压电陶瓷扫描器的非线性始终是影响成像质量的关键问题。该文提出了改善SNOM系统中压电陶瓷扫描器的非线性特性的方法。在测得的压电陶瓷位移-电压关系的基础上,运用校正压电陶瓷非线性的方法,使压电陶瓷扫描器位移输出的线性度大幅度提高,相关系数从0.99提高到0.9999。实验结果表明,经过非线性校正,SNOM光学图像质量得到明显改善。 Scanning near-field optical microscopy(SNOM), based on the formation and detection of non-propagating wave, is capable of optical imaging with the resolution far beyond the diffraction limit of conventional far-field optics. But the non-linearity of PZT scanner in SNOM always infects the image quality for the precision required in nano-meter scale. The linearity and dynamic performance of the composite PZT scanner are dramatically enhanced. Based on the displacement-voltage curves of PZT scanner, which are obtained from experiments, a new method used to correct the nonlinearity of PZT scanner is proposed. The coefficient of linear fit of the test result is raised from 0.99 to 0.999 9 by using this method. The experiment results reveal the quality of optic image obtained by SNOM can be improved obviously after non-linearity correction.

关 键 词： 扫描近场光学显微镜 压电陶瓷扫描器 非线性校正

领　　域： [机械工程] [机械工程] [机械工程]