作　　者： ; ; ;

机构地区： 浙江大学光电信息工程学系现代光学仪器国家重点实验室

出　　处： 《光学仪器》 2004年第1期15-18,共4页

摘　　要： 提出一种光栅反射对准法:在极坐标激光直写系统中利用光栅反射聚焦光斑来校准光轴和工件台的转动轴;被光栅反射的聚焦光斑成像在CCD上。当聚焦透镜的光轴和工件台的转动轴存在对准误差时,如果转动光栅,激光光斑将在光栅上扫描出一个圆形轨迹。通过观测这个轨迹,能估算出光轴和转轴的对准误差并相应地做出调整减小对准误差。采用光栅反射法,现将光轴和转轴的对准误差减少到小于0.5μm。 We present a new method for alignment optical axis and axis of rotation in laser direct writing system using reflection of plane grating. Laser beam which is focused by converging lens is reflected by plane grating and the reflected beam was received by CCD. Turn the plane grating the spot will scan the grating and shape a round trace because of alignment error between optical axis and axis of rotation. By observing the trace we can compute the error and accordingly to adjust the position of optical axis to align with axis of rotation. Alignment error can less than 0.5μm.

关 键 词： 光栅反射对准法 极坐标激光直写系统 光轴 工件台 对准 转轴

领　　域： [机械工程] [机械工程] [机械工程]