作　　者： ; ; ; ; ;

机构地区： 清华大学机械工程学院精密仪器与机械学系

出　　处： 《微纳电子技术》 2003年第7期452-455,460,共5页

摘　　要： 用于航空航天领域微流量控制系统中的微小型阀 ,需要具有耐高压、低泄漏、高频响和高控制精度等综合性能。本文提出了一种可控高压力微流体的常闭微小型阀的设计方案用于满足该系统需要 ,其特点在于采用以较小的致动力控制较高的流体压力的结构原理 ,并以弹性材料薄膜作为阀芯的支承结构件同时作为密封件。该阀由其本体结构和外置致动器两部分构成 ,其本体结构的设计在制作工艺上适合进一步的微小型化 ,外置致动器的设计具有较大灵活性。初步研制了采用电磁致动的小型常闭阀样机既可控气体又可控液体的特性。实验测试其工作压力范围为 0～5atm ,阀的驱动响应时间小于 5ms,流量控制分辨率达到 9μL/ pulse 。 Microvalve used to microfluidic systems for space application is often required to meet rigorous performance, such as high pressure resistance, extremely low leakage, fast actuation speed and exact control precision. In this paper, a normal closed high pressure-resistance miniature valve is designed and endeavors to satisfy the space requirement. In the structural design, low actuating force is utilized to control a high working pressure and an elastic membrane is used as underlay for valve boss to decrease the leakage. The valve is composed of two parts, valve seat and miniature actuator. The structure of valve seat is suitable to be optimized by further miniaturization. The preliminary measuring results show that the prototype valve with miniature electromagnetic actuator allows the regulation of the pressure between 0 ～ 5 atm at the inlet, and its transient response achieves 5ms, and the control precision is 9μL/pulse (N 2).

关 键 词： 电磁控制阀 微小型阀 微流体控制系统 工作性能 流体压力

领　　域： [机械工程]