作　　者： ; ; ; ;

机构地区： 北京信息工程学院传感技术研究中心

出　　处： 《微纳电子技术》 2003年第7期284-288,共5页

摘　　要： 提出一种“旋转载体用硅微机械陀螺” ,给出了该陀螺敏感头的结构尺寸 ,对陀螺角振动方程中出现的转动惯量、弹性支撑梁的扭转刚度系数和角振动阻尼系数分别进行了解析近似计算 ,得到了角振动幅度与被测角速率的关系曲线。用ANSYS仿真分析软件对陀螺结构进行模态分析和谐响应分析 ,比较计算机模拟和解析近似计算结果 ,它们相差不大 。 A type MEMS' silicon gyroscope which is used for circumrotation carrier is present, the structure dimension of sensing element is given, the turn inertia,torsion rigidity of elasticity support beam and damp coefficient have been calculated, the relation curve between the angular oscillation amplitude and being measured angular rate has been derived. By using ANSYS software the vibration mode and harmonic response have been done, after comparing the results of imitation and calculation, it is found that the difference is little, so the results has been validated by each other.

关 键 词： 旋转载体 硅微机械陀螺 动力学分析 仿真 角振动方程 转动惯量 弹性支撑梁

领　　域： [航空宇航科学与技术] [航空宇航科学技术] [电子电信]