作　　者： ; ; ;

机构地区： 中国科学院上海微系统与信息技术研究所

出　　处： 《人工晶体学报》 2003年第2期179-182,共4页

摘　　要： 把非晶金刚石薄膜的XPSC1s谱分解为中心在 2 84 .4± 0 .1eV和 2 85 .2± 0 .1eV的两个高斯特征峰 ,分别对应于碳薄膜中的sp2 C和sp3 C。用这两个高斯特征峰的面积除以C1s谱的总面积 ,得出非晶金刚石薄膜中sp2 C和sp3 C的比例。用上述方法对sp3 C比例不同的一组样品进行了分析计算 ,并与先前用紫外 -可见光吸收光谱和拉曼光谱对同一组样品分析得出的结果进行了比较 ,结果表明 :用XPS谱能简便而有效地定量确定非晶金刚石薄膜中sp2 C和sp3 C的比例 ,且这种方法适用于所有功能碳薄膜。 The C1 s spectra of amorphous diamond films (a-D) were consistently decomposed into the two gaussian components, one is at 284 4±0 1 eV corresponding to sp 2-hybridized bonds, and another is at 285 2±0 1 eV corresponding to sp 3-hybridized bonds. The sp 3 content can be quantitatively calculated from the integrated area of the respective gaussian peak divided by the total area of the spectra. The comparison of XPS with absorption spectra and Raman analysis, the trend of qualitative variation of sp 3 content with V b is in agreement. We concluded that XPS analysis is a useful method for quantitatively calculating sp 3 content in amorphous carbon films.

关 键 词： 非晶金刚石薄膜 键 成分 谱 射线光电子能谱

领　　域： [理学] [理学]