作　　者： ; ; ; ;

机构地区： 中国科学院长春光学精密机械与物理研究所

出　　处： 《微细加工技术》 2003年第2期54-58,共5页

摘　　要： 介绍了一种用于生物医学微流体控制系统的电磁驱动PDMS薄膜微泵。微泵主要由三部分组成,聚二甲基硅氧烷(PDMS)构成的弹性泵膜,粘贴在薄膜底部的钕铁硼永磁薄片以及下部的平面线圈。与硅膜相比,这种泵膜材料使用寿命长,物理化学性质稳定,光学特性和机械特性优良。下部的通电线圈与固连在泵膜上的钕铁硼相互作用,从而引起泵腔体积的变化,进而控制微量流体的进出。泵膜驱动面积为6mm×6mm,厚度为40μm,在频率为5Hz,80mAAC方波信号驱动下,竖直方向上位移可达300μm。 The design and fabrication of a PDMS membrane based electromagnetic micropump for Biomedical microfluidic handling system are reported. The micropump is composed of a thin elastic membrane made of PDMS (polydimethyl siloxane ), a NdFeB piece adhering to the bottom of the PDMS membrane and a planar coil underneath. Compared with silicon membrane, PDMS elastomer has more physical and chemical stability, long lifetime and better mechanical and optical performances. Membrane displacement is caused by the electromagnetic interaction between the NdFeB piece and the coil. And this will control the input and output of the microfluid. When the coil is driven by the square signal of 5 Hz and 80 mA,the maximum displacement of the PDMS mermbrane of 6 mm×6 mm area and 40 μm thickness achieves 300 μm.

关 键 词： 薄膜 电磁驱动 微泵 聚二甲基硅氧烷 钕铁硼永磁薄片

领　　域： [机械工程]