作　　者： ; (曾亮维）; (吴亦冬）;

机构地区： 华南师范大学物理与电信工程学院

出　　处： 《信息通信》 2016年第4期30-31,共2页

摘　　要： 斯托克斯椭偏仪一般使用定标的方法来测量其仪器矩阵,其仪器矩阵的优劣直接影响了被测光线斯托克斯参量的精确度与稳定度,从而影响了被测薄膜的厚度、折射率及消光系数等光学参数的精确度与稳定度。文章以椭偏参数总偏差为评价函数,分析了条件数大小与斯托克斯椭偏仪仪器矩阵的优劣关系,并从实验上证明了条件数较大时,仪器矩阵较差,测量结果偏差大;条件数较小时,仪器矩阵较优,测量结果较佳。 Calibration is generally used for measuring instrument matrix of Stokes ellipsometer. The quality of instru-ment matrix directly affects the accuracy and stability of the Stokes parameter of measured light, indirectly affects the accuracy and stability of optical parameter of measured thin film, such as thickness, refractive index, extinction coef-ficient and so on. This paper analyzes the relationships between the value of condition number and the instrument ma-trix of Stokes ellipsometer. From experiment, the quality of instrument matrix and measure results are worse when the condition number is larger;the quality of instrument matrix and measure results are better when the condition number is smaller.

关 键 词： 斯托克斯参数 椭偏仪 条件数 薄膜测量

领　　域： [一般工业技术]