作　　者： ; ; ; ; ; ; ; ;

机构地区： 深圳大学材料学院深圳市特种功能材料重点实验室

出　　处： 《发光学报》 2014年第8期939-944,共6页

摘　　要： 利用脉冲激光沉积技术在非晶石英衬底上制备立方结构MgZnO薄膜,并研究MgZnO薄膜结晶特性、光学带隙随生长温度的变化情况。当生长温度从150℃升高到700℃时,MgZnO薄膜的生长取向由(200)向(111)转变。在600℃以下,MgZnO薄膜光学带隙的变化规律与晶格中Mg和Zn原子比例的变化趋势是一致的;而当温度升至700℃时,虽然MgZnO晶格中Mg和Zn原子比例降低,但由于平均晶粒尺寸变大,薄膜的光学带隙反而上升。在300℃和700℃晶格匹配的情况下,获得了单一(200)和(111)取向的立方MgZnO薄膜。 Cubic structure Mg1-xZnxO films were deposited by pulsed laser deposition method.The influence of temperature on the growth orientation and optical absorption characteristics of cubic structure Mg1- xZnxO films were studied.The preferred growth orientation of MgZnO thin films changed from(200) to(111) when the growth temperature increased from 150 ℃ to 700 ℃.The UV absorption edge of MgZnO thin film changed with the Mg /Zn ratio in MgZnO crystal lattice when the growth temperature increased from 150 ℃ to 600 ℃.When the temperature changed from 600℃ to 700 ℃,the grain size of MgZnO thin film increased,and the UV absorption edge of MgZnO thin film blue shifted though the Mg /Zn ratio in MgZnO crystal lattice decreased.Finally,single(200) and(111) orientation MgZnO thin films were deposited on(200) and(111) orientation MgO substrates at 300 ℃ and 700 ℃,respectively.

关 键 词： 脉冲激光沉积 光学带隙 生长温度

领　　域： [理学] [理学]