机构地区: 浙江大学
出 处: 《中国机械工程》 2002年第20期1721-1723,共3页
摘 要: 评述了当前主要的 MEMS微制造技术方法及特点 ,综述了基于快速成形的 MEMS微制造系统的基本原理和基本结构 ,目前所能达到的精度与应用典型实例 ,微制造技术的优越性与局限性。对最新发展的每一层面一次曝光的高速快速成形 Main microfabrication techniques for MicroElectroMechanical System (MEMS) are firstly commented on in this paper. The basic principle and framework of MEMS microfabrication system based on rapid prototyping are overviewed, and the microfabrication accuracy and examples are investigated. At last, a latest process called integral microstereolithography process in which a complete layer can be built using a single exposure is also reviewed with some examples.
领 域: [机械工程]