作　　者： ; ; ;

机构地区： 北京科技大学

出　　处： 《工程科学学报》 2017年第2期301-308,共8页

摘　　要： 新型聚合物石英压电传感器制备过程中,AT切型石英压电传感器基体的表面粗糙度及其基膜界面化学性质影响聚合物薄膜的生长,导致聚合物薄膜厚度不均匀、表面存在缺陷,使得传感器采集的频率信号不稳定.本文建立了新型聚合物石英压电传感器在考虑薄膜厚度不均、中心缺陷条件下的力学模型,利用ANSYS有限元软件对其进行模态分析,得到复杂条件下传感器振动特性.模态分析结果发现,传感器固有频率值随聚合物薄膜缺陷的半径值增大呈现出从稳定到发散的趋势、随薄膜的厚度值增大呈现出线性增大的趋势.研究结果表明,新型聚合物石英压电传感器的生产应确保薄膜厚度均匀且严格控制中心缺陷半径小于0.5 mm,该结果为制备稳定的新型聚合物石英压电传感器提供了重要依据. In the preparation process of novel polymer quartz piezoelectric sensors using AT-cut quartz substrates and polymer ma- terials, the roughness and the chemical characteristics of the substrate surface have a great influence on the production of the sensors. It could result in thickness-varied or defective films of the sensors, which make the sensor＇ s frequency signals unstable. In this paper, a mechanical model of the sensor is presented, which takes into account the conditions that the film is thickness-varied and defective. The ANSYS software was used to obtain the vibration characteristics of the mechanical model under complex conditions by modal analy- sis. Results show that the natural frequency values of the sensor change from a stable state to a divergence state with the increase of the film defect in the radius, and the natural frequency values of the sensor increase linearly with increase of the thickness for the film. It indicates that the thickness of the film should be kept uniform and the defect radius should be limited within 0. 5 mm during producing the sensors. The results provide an important basis for producing the qualified polymer quartz piezoelectric sensors.

关 键 词： 压电晶体 传感器 谐振频率 薄膜厚度 模态分析

领　　域： [机械工程] [机械工程]