作　　者： ; ; ; ; ; ; ; (胡二涛）;

机构地区： 复旦大学

出　　处： 《红外与毫米波学报》 2016年第1期1-5,14,共6页

摘　　要： 采用磁控溅射方法在硅衬底上生长了五个不同组分的银铟合金薄膜.采用椭圆偏振光谱仪研究银铟合金薄膜的光学性质.银基金属薄膜一般在3.9 e V附近出现典型的带间跃迁.随着铟含量的增加,银铟合金薄膜的介电函数呈现出明显增加的趋势,典型带间跃迁能量也出现蓝移.结果表明,银铟合金薄膜的光学性质可以通过其中铟元素的含量进行调控.Ag0.93In0.07薄膜比其他四种组分的银铟合金薄膜有着更大的品质因子(Q因子),而且在一些波段甚至比纯金属金和铜的Q因子都要大,这表明银铟合金材料具有成为新型等离子体材料的潜力. Five samples of Ag-In alloy films with different compositions were deposited on Si substrates by magnetron sputtering. The optical properties of these films were studied by spectroscopic ellipsometry. The dielectric functions of the alloy films significantly increase as the In concentration in the Ag-In alloy films is increased. For Ag-based alloys,a typical interband transition occurs near 3. 9 e V. In the tested alloy films,however,this transition energy exhibits a blue shift with increasing In concentration. The optical properties of the alloy films were found to be tunable by varying their In concentrations. The values of the Quality（ Q） factors of the Ag0. 93In0. 07 film are higher than those of other alloy films. At a certain wavelength range,the alloys＇ Q factors even exceed those of pure Au and Cu. Our results showthat Ag-In alloys have significant potential for application in metamaterials and plasmonic devices.

关 键 词： 银铟合金薄膜 光学性质 椭圆偏振光谱仪 磁控溅射

领　　域： [机械工程] [理学] [理学]