作　　者： ; ; ; ; (谈锬）; (王道然）;

机构地区： 广东工业大学材料与能源学院

出　　处： 《中国测试》 2013年第6期10-13,共4页

摘　　要： 依据测量薄膜和光之间相互作用可确定薄膜特性的原理,并基于光反射干涉谱与德国最新研发薄膜分析软件SCOUT的新方法可测量已知或未知材料的多层薄膜厚度及其折射率n、消光系数k。通过实际测试证明:该方法可测试单晶硅、玻璃、ITO玻璃基底上沉积薄膜的厚度,样品基本不需要特别准备,对样品无破坏性,测试精准。理论上可以测量所有透光或半透光薄膜的厚度和光学常数,操作非常简便,适合于镀膜行业的在线检测和实时监控,且SCOUT软件在多层膜及多种材料的研发、制备等方面具有应用潜力。 According to the principle that the properties of the film can be determined by measuring the interaction between the film and the light, and based on the light reflection interference spectrum and Germany’s new SCOUT thin film analysis software,a new method was utilized to measure the thickness, refractive index and extinction coefficient of the known or unknown multilayer materials. This method can be applied to measure the thickness of the film on monocrystalline silicon, glass and ITO glass substrates and it does not require special preparations and no destruction for samples and the results are accurate. Theoretically the thickness and optical constants of all transparent or semi-transparent films can be determined with the method. It is convenient to operate,and particularly suitable for the on-line detection and real-time monitoring in coating industry. The SCOUT software has wide application in R＆D and preparation of multilayer film and multi-materials.

关 键 词： 纳米薄膜 光反射干涉谱 薄膜厚度 折射率 消光系数

领　　域： [理学] [理学] [机械工程] [理学] [理学]