作　　者： ; ; ; ; ;

机构地区： 华南理工大学机械与汽车工程学院机械电子工程系

出　　处： 《中国有色金属学报》 2001年第6期1064-1068,共5页

摘　　要： 研究了同时加入Fe与Cr进行改性的 (TiFeCr)N多元膜的高温氧化行为。结果表明 :当氧化温度高于6 0 0℃时 ,这种多元膜的氧化增质均低于TiN膜 ;80 0℃氧化后膜层完整 ,没有出现类似TiN膜的局部脱落现象。基体对多元膜的氧化产物无明显影响 ,70 0℃氧化后两种基体上的多元膜均转变为TiO2 (金红石 ) ;但基体对TiN膜的氧化产物却有明显影响 ,在Cu基体上膜层的氧化产物由TiO2 及少量Ti3 O5组成 ,而玻璃基体上膜层的氧化产物则由Ti3 O5及少量TiO2 组成。 The high temperature oxidation behavior of (Fe+Cr) modified (TiFeCr)N films was investigated. The results show that the mass gains of the multi component films at the higher oxidation temperatures, over 600?℃, were lower than those of TiN films. There was no local spallation similar to TiN films after treatment at 800?℃ for 1?h. The substrates had no evident effect on oxidation products of multi component films. Multi component films on the two substrate transformed into TiO 2(Rutile) after the treatment at 700?℃ for 1?h. However the substrate had an evident effect on that of TiN films. The transformed products of TiN films on copper substrate consisted of TiO 2(Rutile) and a few Ti 3O 5, while these on glass substrate consisted of Ti 3O 5 and a few TiO 2.

关 键 词： 多元膜 离子镀 高温氧化 热重分析 射线衍射

领　　域： [金属学及工艺] [金属学及工艺]