作　　者： ; ;

机构地区： 深圳大学理学院

出　　处： 《物理学报》 2001年第12期2403-2407,共5页

摘　　要： 利用自行研制的传感器和测量装置 ,通过对射频放电电压、电流以及其相位角的精确测定 ,算出放电管的总阻抗 ,结合放电管的等效电路模型与Godyak等建立的射频放电模型 ,对射频激励铜离子激光管在氦气中的放电特性进行了研究 ,得出射频激励铜离子激光器不同气压及电流密度下的等离子体电阻、容抗。 It is presented in this paper that the method known from network analysis with home-made probe and experimental setup to measure current, voltage and phase angle of RF discharge in He gas more accurately. The sheath thickness and the real and imaginary parts of the plasma impedance were obtained by using the equivalent circuit model and taking account stray capacitances of the set-up. In addition, making use of Godyak's RF discharge simple model, the electron density in the discharge was calculated at different pressure and current density.

关 键 词： 射频放电 阻抗测量 等离子体诊断 电阻 容抗 电子密度

领　　域： [理学] [理学] [核科学技术]