作　　者： ; ; ; ; ; ;

机构地区： 广东工业大学材料与能源学院

出　　处： 《材料导报》 2013年第12期27-30,共4页

摘　　要： 用原子层沉积法在钠钙玻璃上沉积氧化锌薄膜,利用场发射扫描电镜和X射线衍射(XRD)等对样品表面形貌和物相进行分析,结果表明得到的ZnO纳米颗粒为六角纤锌矿结构,颗粒的尺寸在30～60nm之间;测得的ZnO薄膜厚度仅50nm,符合缓冲层要求;薄膜在可见光区域透射率达90%以上;使用原子层沉积氧化锌薄膜作铜铟镓硒太阳能电池的缓冲层,TEM显示氧化锌层完好、致密地覆盖在CIGS层上,电池的光电转换效率较高,完全可以替代有毒的CdS作缓冲层。 A zinc oxide thin-film was deposited on soda lime glass with the method of atomic layer deposition （ALD）, and field emission scanning electron microscope and X-ray diffractometer were employed to analyze the surface appearance and phase of the sample. The results show that the nanoparticle of ZnO is hexangular wurtzite structure and the size of particle is 30--60 nm. The measured thickness of ZnO thin-film is only 50 nm, which can meet the requirement of buffer layer. Transmittance of the thin-film in visible light area is more than 90%. Using atomic layer deposited zinc oxide thin-film as buffer layer of copper indium gallium selenium （CIGS） solar battery, it can be found that the zinc oxide layer covers the CIGS layer tightly, and that the photoelectric conversion efficiency of battery is high, so it can fully replace the toxic CdS as buffer layer.

关 键 词： 原子层沉积 氧化锌薄膜 铜铟镓硒太阳能电池 缓冲层

领　　域： [电气工程]