机构地区: 安庆师范学院物理与电气工程学院
出 处: 《安庆师范学院学报(自然科学版)》 2013年第2期76-79,共4页
摘 要: 利用RGA100质谱仪成功地实现了对SiH4辉光放电等离子体的在线检测。根据线性拟合的方法获得了SiH4消耗率及中性基团SiHn(n=1,2,3)在空间的分布规律,并对此进行了详细的分析和讨论。 We successfully detected SiH4 glow discharge plasma by RGA100 mass spectrometer. The axial distribution of the SiH4 depletion fraction and the neutral radicals were obtained by the proposed straight - line fit method. The experimental results were analyzed and discussed in detail.