作　　者： ; ; (李雪）; (赵治亚）;

机构地区： 深圳职业技术学院应用化学与生物技术学院

出　　处： 《电子元件与材料》 2013年第5期52-55,共4页

摘　　要： 研究了玻璃与具有Fe3O4氧化膜的可伐合金的封接工艺。结果表明最佳熔封温度为980℃,熔封时间为30 min。在此基础上,开发出将脱碳、氧化和熔封集于一个升降温周期的一步封接工艺。该工艺是将未氧化的可伐合金和玻坯首先升温至500℃并氧化40 min,而后升温至980℃并保温30 min,最后缓慢降至室温。结果表明,当采用该工艺时,与传统工艺相比不仅能简化操作,而且封接件的封接质量更高、可靠性更好。 The sealing process of glass to Kovar with Fe3O4 oxidation film was investigated. The results indicate that the optimization sealing temperature is about 980 ℃ and the fusing sealing time is 30 rain. On this basis, the one-step sealing process was developed which included decarburization, oxidation and sealing in a cycle of heating and cooling. In this process, un-oxidized Kovar and glass slab were firstly heated to 500 ℃ for 40 min, then heated to 980 ℃ for 30 rain, then slowly cooled to room temperature. The results show that this process is more simplified than that of traditional process, and the reliability and quality are better than that of traditional process.

关 键 词： 可伐合金 玻璃 封接 氧化膜 气密封接 爬坡高度 结合强度

领　　域： [金属学及工艺]