作　　者： ; ; ;

机构地区： 南京师范大学物理科学与技术学院

出　　处： 《中国表面工程》 2013年第1期45-50,共6页

摘　　要： 利用涂饰技术调控弹性体材料的表面形貌,有助于提高表面材料的稳定性及相关器件的运行性能,同时为微纳米尺寸的图形制备提供参考。通过物理气相沉积法在弹性体PDMS(聚二甲基硅氧烷)衬底表面分别沉积了SiO2、MgF2及ZnS三种介电质材料并对各形貌的形成进行了分析。结果表明,通过在PDMS衬底表面蒸镀不同的介电质材料,可以形成褶皱、龟裂及平坦的表面形貌;通过光刻及软光刻技术在衬底表面预制具有周期性的凹状图形,可以对褶皱、龟裂的方向进行调控,使褶皱、龟裂等形貌呈有序性分布;通过对比介电质材料在加热冷却过程中所受的应力与临界应力的大小,可以方便地选择合适的介电质材料来制备所需的弹性体表面形貌。 Regulating the surface morphology of elastomer material by coating technology is benefit to im- prove the stability of the materials and the performance of the devices, as well as the fabrication of micro/nano patterns. In this paper, three dielectric materials （SiO2, MgF2 and ZnS） are coated on polydimethylsiloxane （PDMS） by physical vapor deposition （PVD）. The results indicate that wrinkles, cracks, and flat morpholo- gy are formed when different dielectric films are deposited on PDMS. The directions of wrinkles and cracks are determined by prefabricating periodic patterns on PDMS through lithography and soft lithography technology. By comparing the material stress during the process of heating and cooling with critical stress, suitable dielec- tric material can be easily chosen to prepare the materials with different surface morphologies.

关 键 词： 表面形貌 物理气相沉积 应力

领　　域： [金属学及工艺] [金属学及工艺] [化学工程]