作　　者： ; ; ;

机构地区： 福建农林大学机电工程学院

出　　处： 《福建农林大学学报（自然科学版）》 2012年第6期650-654,共5页

摘　　要： 采用溶胶-凝胶法在石英衬底上制备掺铟氧化锌薄膜,研究不同退火温度对薄膜结构及发光性能的影响.结果表明,掺铟氧化锌薄膜仍为六角纤锌矿结构的ZnO相,在大于450 nm的波段薄膜样品的透射率都较高;随着退火温度的升高,透射率先增后减,600℃时达到最大;薄膜样品的光学带隙都小于纯ZnO的理论值(3.37 eV),且随退火温度的升高呈先减后增趋势;样品的结晶度与发光强度随着退火温度的升高而增强. Indium-doped ZnO thin films were prepared on quartz substrates by using sol-gel method, the results were as follows： in- dium-doped ZnO thin films exhibited a hexagonal wurtzite ZnO phase structure; in the wavelength of above 450 nm, thin films showed high optical transmittance which was related to the annealing temperature of samples; optical transmittance of thin films first- ly increased, reached the maximum vaule under sample annealing temperature of 600 ℃, then decreased. The band gaps of all sam- ples were lower than the theoretical value of pure ZNO（3.37 eV）. With the increase of annealing temperature the band gaps of sam- pies first decreased and then increased. The degree of crystallinity and the luminous intensity of the sample increased with the in- crease of annealing temperature.

关 键 词： 掺铟氧化锌 溶胶 凝胶法 半高宽 光学带隙

领　　域： [理学] [理学]