作　　者： ; ; ; ; ;

机构地区： 山东大学机械工程学院

出　　处： 《材料工程》 2012年第5期30-34,38,共6页

摘　　要： 采用多弧离子镀膜法,在YT15及YG8硬质合金基体上沉积ZrTiN硬质涂层,并分析涂层微观形貌、物相组成、涂层的厚度、硬度及结合力等性能参数随沉积时间的变化。结果表明:沉积时间不会影响ZrTiN涂层的晶面指数,涂层中只有单一面心立方结构相形成,且晶面指数始终为(111);涂层的晶粒尺寸约为10nm且随沉积时间变化不大。沉积时间为120min时,涂层的显微硬度和结合力明显下降。 Multi arc ion plating ZrTiN hard coatings were deposited on WC/TiC/Co and WC/Co ce- mented carbide substrate with independent Ti and Zr targets. The effect of deposition time on morphology, phase composition, thickness, hardness and adhesive strength of the coatings was investigated, respectively. The results show that only face centered cubic structure phase forms in the coatings and the crystal orientation maintains （111）. Grain size of the coating is around 10nm without changing during experimental process. Microhardness and adhesive strength of the coatings decline evidently when deposition time is 120rain.

关 键 词： 涂层 多弧离子镀 沉积时间 微观结构 性能

领　　域： [理学] [理学]