作　　者： ; ; ; ;

机构地区： 深圳大学材料学院深圳市特种功能材料重点实验室

出　　处： 《物理学报》 2012年第8期452-460,共9页

摘　　要： 采用电子回旋共振-化学气相沉积结合中频磁控溅射的真空镀膜技术,以99.99%Ti为靶材,乙炔为碳源制备了Ti/Ti-类金刚石(DLC)多层膜.利用X射线衍射仪、扫描电子显微镜、X射线光电子能谱仪对Ti/Ti-DLC多层膜进行了相结构、组织、成分及形态分析.采用显微硬度仪、摩擦磨损仪、表面粗糙度仪对Ti/Ti-DLC多层膜进行了力学性能考察.结果表明:Ti/Ti-DLC多层膜中主要含有TiC晶相;Ti层和Ti-DLC层中未出现柱状晶体生长模式,分层中均以岛状模式生长;当调制周期A≤50 nm时,分层结构变模糊;调制周期A对Ti/Ti-DLC多层膜的复合硬度、摩擦系数、表面形貌、表面粗糙度都有影响,当调制周期A较小时表现出纳米增硬效应,表面出现大颗粒,表面粗糙度和摩擦系数均变大. The titanium/titanium diamond-like carbon （Ti/Ti-DLC） multi-layered films are deposited by combined electron cyclotron resonance microwave plasma enhanced chemical vapor deposition method and mid-frequency magnetron sputtering method using acetylene as the reactive gas and Ti target with a purity of 99.99%. The structures, compositions and surface morphologies of the samples are characterized by X-ray diffraction, scanning electron microscope, and X-ray photoelectron spectrometer. The mechanical properties of Ti/Ti-DLC multilayer films are investigated by microhardness tester, friction wear test instrument and surface roughmeter. The results show that TiC phase appears in multilayered film. The main growth mode of the film is island mode and there exists columnar crystal structure neither in Ti layer nor Ti-DLC layer. The properties of the multi-layered film, including composite hardness, friction coefficient, surface morphology and surface roughness are affected by the modulation period A. It is shown that nano-hardening effect takes place when A is small while large particles appear on the surface of the film, leading to a large surface roughness and friction coefficient. The layered structure of the film is not clear when A ≤ 50 nm.

关 键 词： 类金刚石多层膜 电子回旋共振 化学气相沉积 调制周期

领　　域： [理学] [理学]