作　　者： ; ; ;

机构地区： 华南理工大学材料科学与工程学院特种功能材料教育部重点实验室

出　　处： 《材料科学与工程学报》 2012年第1期9-13,共5页

摘　　要： 采用溶胶-凝胶工艺在碱催化条件下制备了多孔结构的纳米SiO2薄膜,研究了不同醇硅比对溶胶体系的粒度分布、薄膜折射率以及透过率的影响。用纳米粒度分析仪测试了溶胶的颗粒分布,用紫外-可见-近红外分光光度计、椭偏仪、原子力显微镜(AFM)、扫描电子显微镜(SEM)测试了薄膜的光学性能、折射率、膜厚和显微形貌等。结果表明:随着醇硅比的增大,溶胶体系粘度下降,凝胶时间延长,颗粒度下降,折射率有升高的趋势;制备的增透玻璃膜层折射率为1.24,可见光透过率达到98.22%。 Silica sol was prepared using TEOS as precursor and ammonia as catalyst by sol-gel process.Effects of EtOH/TEOS molar ratio on the particle size distribution,refractive index and transmission were analyzed in this paper.Distribution of sol particles was tested by nano-particle size analyzer.The transmittance,refractive index,thickness of the obtained coatings were analyzed by UV-visible-near infrared spectrophotometry,ellipsometry,respectively,and the morphology was observed by atomic force microscopy（AFM） and scanning electron microscopy（SEM）.The results show that the viscosity of the sol reduces with the increasing of EtOH/TEOS molar ratio,and the refractive index gradually increases while the particle size decreases.The anti-reflective glass having a coating with a refractive index of 1.24 and a visible light transmittance of 98.22% was prepared successfully.

关 键 词： 溶胶 凝胶 二氧化硅薄膜 减反膜 太阳能玻璃 醇硅比

领　　域： [理学] [理学]