作　　者： ; ; ; ;

机构地区： 教育部

出　　处： 《实验技术与管理》 2012年第2期71-75,共5页

摘　　要： 利用Visual Basic 2010结合OpenGL API,在Windows 7操作系统平台下制作了真空镀膜实验仿真系统。三维虚拟设备模型由3D MAX软件制作,三维模型交互操作通过OpenGL API实现。该软件还可以模拟真空仪器所处的各种运行状态并对操作错误步骤进行处理。构造了薄膜生长的蒙特卡罗理论模型,并利用该模型研究薄膜生长的形貌,对于决定薄膜形貌诸多影响因素也可进行讨论;利用高性能图形处理软件(OpenGL API)成功展示了薄膜成长的分形特征及表面粗糙度表征。该软件有效地实现了镀膜过程及薄膜生长过程,增强了学生对薄膜生长机理的理解,提高了教学质量,培养了学生学习兴趣和增强了学生的实验操作能力。 Based on the research on the characteristics of the vacuum film experiment,this article introduces a design method of simulated experiment system which is based on OpenGL API and developed with Visual Basic 2010 under Windows7 platform.Three-dimensional virtual equipment via 3D MAX is built and 3D interaction is realized by OpenGL API.Furthermore,the vacuum film experiment simulation software is connected so as to simulate various running states of substation by handlers and to treat operation fault.A Monte Carlo model to simulate thin film growth is constructed and the morphology of thin film growth is investigated by using this model.How many factors affect the morphology of vapor coating film is shown by simulated experimental methods.The function of 3D display of film surface is realized by a high-performance graphic processing system（OpenGL API）.The software successfully shows the fractal geometric characters and the surface roughness.The simulation experiments integrate theory and practice effectively,and strengthen students＇ understanding of thin film growth mechanism.In the application of experiment and teaching,this system increases teacher＇s attraction,improves teaching quality,arouses student＇s interest of study and enhances the student＇s ability of operation.

关 键 词： 真空镀膜机 仿真系统

领　　域： [一般工业技术] [自动化与计算机技术] [自动化与计算机技术]