作　　者： ; ; ; ;

机构地区： 华南农业大学理学院应用物理系

出　　处： 《激光技术》 2011年第6期784-786,836,共4页

摘　　要： 为了对漫反射材料小尺寸平面的平整度进行检测,提出采用载频条纹相位分析的方法。该方法采用激光作为照明光源,通过相干获得周期为100μm的条纹,使用傅里叶变换条纹相位分析提取待测表面的调制相位并可以转换为表面高度分布,从而能够实现对材料表面平整度的评价。结果表明,系统高度分辨力为10μm;考虑到噪声的影响,实际分辨力可以达到20μm。所给出的实际实验结果显示该方法是可行的。 In order to detect and evaluate the flatness of small plane of diffuse reflection, a method was presented based on carrier fringe phase analysis. With a laser as illuminating light source, a coherent fringe pattern at period of 100μm was achieved. The modulated phase distribution of the testing surface was retrieved after Fourier transform and converted into the physical height distribution, and then these height data were applied to evaluate the surface flatness. The detailed theoretical analysis was presented. The theoretical height resolution can reach 10μm. Due to the effect of the noise, the experimental height resolution only reached 20μm. The experimental results prove that the method is valid.

关 键 词： 信息光学 平整度检测 条纹分析 漫反射材料

领　　域： [机械工程] [理学] [理学]