作　　者： ; ;

机构地区： 哈尔滨工业大学航天学院

出　　处： 《人工晶体学报》 1999年第3期275-278,共4页

摘　　要： 本文采用燃烧焰法观察金刚石薄膜的成核生长过程。分析了衬底表面刻划及油污处理等因素对金刚石成核的影响。观察到成核初期的金刚石不具有明显晶形，含有较高的石墨相。 Ｘ Ｒ Ｄ 谱表明：成核初期衬底表面形成非金刚石结构的过渡层。并提出了控制成核密度提高沉积质量的思想。 The process of nuclei formation of diamond film was observed with flame combustion.The effects of substrate cutting and oil covering on the nuclei formation were determined and discussed.Diamond film formed during the first stage possesses an amorphous morphology richedr in graphite,which is determined to be a transition lager of non diamond structure by XRD spectrum.An ideal was proposed that the quality of vapor deposition diamond films could improved by controlling nucleation density.

关 键 词： 化学气相沉积法 燃烧焰 金刚石薄膜 成核

领　　域： [理学] [理学] [理学] [理学]