机构地区: 哈尔滨工业大学航天学院
出 处: 《人工晶体学报》 1999年第4期364-367,共4页
摘 要: 本文探讨了在燃烧焰法沉积金刚石薄膜过程中,稀释气体Ar 对沉积质量的影响。发现在成膜过程中适当量的Ar 起到增大内焰体积、降低沉积速率和提高晶型质量的作用。文中分析了其原因,并实现了利用Ar 来控制高质量金刚石薄膜的生长。 The effect of dilute argon gas on the quality of diamond film observed by combustion flame method was investigated.It is shown that the enlarged inner flame and decreased the growth rate result in the improvement of film morphology.The quality of as grown diamond film can be improved by controlling the rate of argon gas flow.