作　　者： ; ;

机构地区： 深圳职业技术学院

出　　处： 《电子元件与材料》 2011年第5期61-64,共4页

摘　　要： 研究了可伐合金表面氧化膜的类型和厚度对玻璃与可伐合金封接质量的影响。结果表明,氧化膜的类型和厚度直接影响金属与玻璃的封接质量。相对于工厂氧化条件,在可控条件下氧化的可伐合金与玻璃封接后的气密性一致性和可靠性较高。随着氧化膜厚度的增加,玻璃沿引线的爬坡高度逐渐增加,当控制氧化膜厚度不超过1.5μm时,爬坡高度都小于200μm;而结合强度先增加而后逐渐减小,最高结合强度可达到约66 N。当将氧化膜厚度控制在0.5～1.0μm,可以保证产品的封接质量较高。 The effects of the types and thicknesses of Kovar alloy oxidation film on the sealing quality with glass were investigated.The results show that the types and thicknesses of the oxidation film have an important impact on the sealing quality.Compared with the oxidation condition in factories,the uniformity and reliability of the gas tightness of Kovar alloy sealing with glass in the controlled oxidation condition are higher.The climbing height of glass along the pins increases gradually with the increasing thickness of oxidation film,while all the heights are lower than 200 μm when the thickness of oxidation film is less than 1.5 μm;the bonding strength increases firstly and then decreases gradually,and the optimized bonding strength is about 66 N.The sealing quality is higher when the thickness of oxidation film is 0.5-1.0 μm.

关 键 词： 可伐合金 氧化膜 玻璃 封接

领　　域： [金属学及工艺]