作　　者： ; ; ; ; ; ;

机构地区： 深圳大学

出　　处： 《深圳大学学报（理工版）》 2011年第1期17-22,共6页

摘　　要： 研究基于强度解调技术的Fabry-Perot干涉型光纤微机电系统(micro-electro-mechanical systems,MEMS)压力传感器.该传感器采用MEMS各向异性腐蚀工艺加工的方形硅杯,其硅杯结构尺寸和表面光洁度比圆形压力敏感膜一致性好.传感器采用大面积比的方法,降低硅敏感膜片弯曲变形所引起的非线性测量误差,新增参考光路以补偿光源功率波动对测量的影响.在0～38kPa压力范围内实现了单值测量,相对灵敏度达到0.7%/kPa.实验与理论分析结果一致,具有很好的测量重复性.提出的多波长和多传感融合的测量方法,可用于扩大测量范围,提高灵敏度. An optical fiber pressure sensor was designed,fabricated and characterized.It employed a Fabry-Perot （F-P） interferometer and simple intensity-demodulation technology.A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm.A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection.Reference light generated from a 2×2 optical fiber coupler is used to decrease the influence of intensity variations of the light source.Single-value measurement was achieved under the pressure range from 0 to 38 kPa.The experimental results demonstrate an upmost relative sensitivity of 0.7%/kPa and a reasonable repeatability,consisting well with the theoretical analysis and simulation.A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity.

关 键 词： 传感器技术 光纤光学 压力测量 微机电系统 干涉 方形硅膜 强度调制

领　　域： [自动化与计算机技术] [自动化与计算机技术] [机械工程] [机械工程]