机构地区: 重庆邮电大学通信与信息工程学院光纤通信技术重点实验室
出 处: 《功能材料》 2010年第10期1691-1693,共3页
摘 要: 对蓝宝石衬底上生长的一系列AlxGa1-xN薄膜进行了椭圆偏振光谱研究,得到了薄膜的厚度以及245~1000nm的光学常数;通过有效介质模型计算出Al组分;随着Al组分的增加,折射率n下降,吸收边蓝移,与透射光谱结果一致。 A series of AlxGa1-xN films grown on sapphire were measured applying spectroscopic ellipsometry. The films thickness and optical constants in 245-1000nm range are obtained by fitting.And Al composition is calculated by effective-medium-approximation(EMA)model.With Al composition increasing,the refractive index ndecreases,absorption edge shifts to shorter wavelength.The results are in good agreement with that of transmission spectrum.