作　　者： ; ; ; ;

机构地区： 中国科学院深圳先进技术研究院

出　　处： 《材料导报》 2010年第5期114-118,127,共6页

摘　　要： 随着先进制造技术的发展,许多精密系统中的薄膜厚度已经接近纳米量级。由于纳米尺度的特殊性,宏观尺度下的界面性质将不再适用,因此探索纳米尺度下的界面性质对于微机电系统(MEMS)甚至纳机电系统(NEMS)中涉及到的润滑薄膜研究具有非常重要的价值。Couette流动作为剪切驱动流动的原形,在研究薄膜界面滑移现象上具有较高的代表性。在总结国内外该方向研究成果的基础上,详细介绍和讨论了纳米尺度薄膜Couette流动的分子动力学方法,总结了现有的滑移现象和规律,并对今后的发展进行了展望。 With the development of advanced manufacturing technologies, the thin films used in precision systems are approaching nano scale. Due to the characteristics of nano scale, the interfaeial behavior attained from macro- scopic scale previously is not suitable. Therefore, studying the interracial behavior of nanometer thin films used in the micro electro-mechanic systems（MEMS） even nano electro-mechanic systems（NEMS） is of great value of research. As the prototype of the shear-driven flow, Couette flow is highly representative in studying the interracial slip behavior for nanometer thin films. Based on the review of the research results at home and abroad, the molecular dynamics （MD） simulation methods about the Couette flow for nanometer thin films are discussed in details. Furthermore, the existing interracial slip behavior is summarized. Finally, the future work in this area is proposed.

关 键 词： 纳米薄膜 界面滑移现象 分子动力学

领　　域： [一般工业技术] [一般工业技术]