作　　者： ; ; ; ; ; ;

机构地区： 华中科技大学机械科学与工程学院数字制造与装备技术国家重点实验室

出　　处： 《中国机械工程》 2010年第2期222-225,共4页

摘　　要： 研究了利用硅模具进行微成形的热压工艺,针对超塑性成形Zr65Cu17.5Al10Ni7.5非晶合金微零件过程进行分析,提出精确去除非晶合金飞边的方法,并采用质量分数为40%的KOH溶液(温度为80℃)腐蚀去除硅模具得到微型零件。利用该工艺成功制备出尺寸精度很高、模数为0.1mm、齿数为20、厚度为300μm的非晶态微型直齿圆柱齿轮。该工艺用于制备高性能非晶合金微型零件优势明显,尤其对于芯部是复杂结构的微型零件更具成形优势。 Micro--forming hot embossing process with silicon mold was studied, and superplastic micro--forming of Zr65 Cu17.5 All0 Ni7.5 bulk metallic glass micro--parts was analyzed. Mechanical grinding was put forward to accurately remove the flashes of bulk metallic glass micro--parts. The micro--parts with silicon mold were then dipped into potassium hydroxide solution at 80℃ to dissolve the mold and obtain the others. The process is utilizd and a good dimensional accuracy for an amorphous micro--spur gear with 0.1 module,20 teeth and 300 micrometers in thickness is obtained. It follows from the results that the technology is promising for manufacturing high--performance complex micro amorphous components especially for those with complex structure in the core.

关 键 词： 非晶合金 微成形 硅模具 微齿轮

领　　域： [一般工业技术]