机构地区: 广东工业大学材料与能源学院
出 处: 《金属热处理》 2009年第11期18-22,共5页
摘 要: 以工业纯铁表面形成Fe-11W-7Mo-23Co型合金为例,阐述了双层辉光离子多元共渗的源极成分设计思路。通过对工业纯铁表面进行W、Mo、Co多元共渗,探讨了合金元素溅射产额的不同对源极溅射成分的影响。结果表明,双层辉光离子多元共渗时,源极成分设计可以忽略合金元素溅射产额的影响。 Source cathode composition design was investigated in multi-element surface alloying by double glow plasma technique with the example of forming Fe-11W-7Mo-23Co alloy in surface of pure iron. The influence of different element sputtering rates on sputter produce was discussed by W-Mo-Co co-diffusion. The experiment results show that the influence of different element sputtering rates can be neglected in source cathode composition design.
关 键 词: 双层辉光等离子渗金属 多元共渗 源极成分设计