作　　者： ; ; ; ; ;

机构地区： 广州大学物理与电子工程学院

出　　处： 《光学仪器》 2009年第4期88-92,共5页

摘　　要： 运用自行设计的直接耦合石英管微波等离子体化学气相沉积(microwave plasmachemical vapor deposition,MPCVD)装置,以氢气和甲烷为反应气体,沉积出八个金刚石膜样品。研究了甲烷浓度对所沉积金刚石膜色度的影响。结果显示随着甲烷浓度的升高,饱和纯度和色纯度逐渐升高,甲烷浓度达到5.863%时,饱和纯度和色度纯度达到最大,分别为8.5%和9.5%,之后随着CH_4浓度的升高饱和纯度和色纯度开始下降。 By using the device of self-designed direct coupling quartz tube microwave plasma chemical vapor deposition （MPCVD）, eight diamond thin films were deposited, utilizing hydrogen and methane as the reactant gases. The influence of MPCVD diamond film chromaticity on methane concentration was studied. It was shown that the saturated purity and chromaticity purity o{ diamond films increase with methane concentration increasing, when methane concentration was 5. 863%, its arrive at their biggest values which was 8. 5% and 9.5 %, and then, its began to reduce with methane concentration increasing.

关 键 词： 色度学 金刚石膜 饱和纯度 色度纯度

领　　域： [机械工程] [理学] [理学]