作　　者： ; ; ; ; ;

机构地区： 广东工业大学

出　　处： 《机械工程材料》 1998年第3期13-16,共4页

摘　　要： 借助SEM、XRD和Raman光谱等分析方法对不同沉积功率条件下合成的金刚石膜形貌、结构和质量进行了表征，并采用压痕试验法评定了金刚石膜与基体的结合性能。结果表明，沉积功率对金刚石膜的结晶质量、纯度、残余应力、点阵畸变、嵌镶块尺寸有影响。高的沉积功率使基体表面显微粗糙化，并发生脱碳现象，显著改善了金刚石膜与基体的结合性能。 The morphology, structure and quality of the diamond film synthesized by using various deposition power have been characterized by means of SEM, XRD, and Raman spectroscopy respective-ly. The adhesive strength between diamond film and substrate has also been evaluated by indentation test method. The results show that deposition power has an innuence on the crystalline quality, purity, residual stress, lattice distortion and mosaic block size of the grown diamond film. The higher deposi-tion power can make substrate surface micro-roughened and decarburized, which significantly improves the adhesive strength between diamond film and substrate

关 键 词： 金刚石膜 沉积功率 结晶质量 薄膜 结合性能

领　　域： [理学] [理学] [理学] [理学]