作　　者： ; ; ; ; ; ;

机构地区： 大连理工大学机械工程学院精密与特种加工教育部重点实验室

出　　处： 《压电与声光》 2009年第3期360-363,共4页

摘　　要： 采用两片由压电系数d11转换的xy切型压电石英晶片构成单元晶组,研究了多次压电效应对压电传感器的影响,通过与传感器并联电容的方法使其不发生多次压电效应,得出了多次压电效应对传感器静态灵敏度的影响,实验结果表明,在0.1μF的并联电容下,传感器的灵敏度从4.00 pC/N增大到4.07 pC/N,提高了1.75%,进一步分析表明,传感器灵敏度发生变化的实质是多次压电效应影响了压电系数,同时探讨了灵敏度提高后多次压电效应对弹性系数以及传感器刚度和固有频率的影响。多次压电效应的研究为压电类传感器性能的提高提供了一种新方法。 Through composing a piezoelectric group consisting of two xy cutting-type quartz wafers transformed by d,x , the influence of multiple piezoelectric effects on piezoelectric quartz sensors is studied. The influence of the static sensitivity of piezoelectric sensors is obtained by means of the method that a capacitor is paralleled with the sensor to eliminate the multiple piezoelectric effects. The experimental result shows that sensor＇s static sensitivity increases from 4.00 pC/N to 4.07 pC/N under 0.1 μF parallel capacitor, improving sensitivity by 1.75%. Further nalysis indicates that the multiple piezoelectric effects have an influence on the piezoelectric coefficient that makes the sensitivity alter. Meanwhile, the influence on the elastic coefficient and the stiffness and the natural frequency of sensors is investigated after sensitivity is improved. The study of multiple piezoelectric effects provides a new method for the improvement of performance of piezoelectric sensors.

关 键 词： 多次压电效应 石英晶体 压电传感器 灵敏度 压电系数

领　　域： [机械工程] [机械工程] [自动化与计算机技术] [自动化与计算机技术]