作　　者： ; ; ; ;

机构地区： 华中科技大学机械科学与工程学院

出　　处： 《测控技术》 2008年第6期5-8,共4页

摘　　要： 微机电系统中微结构特征尺寸在微米亚微米,且谐振频率可达兆赫,对其进行动态测量困难。介绍了一种基于频闪照明与显微相移干涉原理的微结构三维运动测量方法,并给出了微镜的测量结果。测量结果可作为设计与制造工艺反馈。 The critical dimension of microstructures in micro electromechanical systems （MEMS） is on micron and submicron level, and its resonant frequency can reach mega Hertz, so it is difficult to carry out three dimensional and dynamic characterization. One method is introduced which bases on strobe illumination and micro phase shifting interferometry and can realize the dynamic characterization of microstructures in MEMS. The testing results of micro-mirror are also presented, which can give feedback to its design and manufacturing process improvement.

关 键 词： 微结构 频闪照明 显微相移干涉 相位去包裹

领　　域： [电子电信]