作　　者： ; ; ; ; ;

机构地区： 上海交通大学微纳米科学技术研究院微米纳米加工技术国家级重点实验室

出　　处： 《传感器与微系统》 2008年第4期92-93,96,共3页

摘　　要： 介绍一种基于MEMS技术的主动式光纤连接器,上层为双层结构电热驱动器,下层为硅V型槽。双层结构在常温下作为压制光纤的盖板,通电后作为单稳态电热驱动器,盖板翘曲,放入或取出光纤。利用Ansys有限元分析软件并结合工艺条件,对热驱动器部件的性能进行了分析与仿真。利用表面硅工艺和体硅工艺制备出核心驱动部分,检测盖板翘曲情况下性能。 An optical fiber connector based on MEMS technology is presented. Nickel thin film cover plate is manufactured on the SiO2 layer above the silicon Ⅴ-shaped groove to form two-layers structure. This structure can be both used as a cover plate under normal temperature and a electro-thermal micro actuator in the temperature rising process. Optical fiber can be put into the V-groove when the two-layers structure warps during this process. The relationship between the structure parameters and the thermal actuator＇ s capability is simulated and analyzed by Ansys,the optimize structure is got.

关 键 词： 光纤连接器 微机电系统 双层薄膜

领　　域： [电子电信] [电子电信] [电子电信]