作　　者： ; ; ; ; ;

机构地区： 华中科技大学机械科学与工程学院

出　　处： 《功能材料与器件学报》 2008年第1期143-147,共5页

摘　　要： 在应用林尼克结构干涉测量系统进行测量时,发现系统存在一个近似为二次曲面的测量误差。根据光学干涉系统的测量原理,分别对林尼克结构干涉测量系统的相移器误差、摄像机误差和光学系统误差进行了分析,确定光学系统误差是干涉测量系统的主要误差源,其中显微物镜焦点轴向误差是产生系统测量误差曲面的主要原因。以平面为实验测量样件,应用测量系统对参考光臂显微物镜的不同轴向位置进行了测量,通过分析测量结果验证了焦点轴向误差对系统测量误差的影响,并与理论结果进行了比较。 A measure error which is approximated to a conicoid was discovered in the measurement of Linnik Interferometry System. On the basis of optical interferometry measurement principle, the phase - shift error, camera error and optical error were analyzed and the optical error was confirmed to he the main error source and the focus axial error of the objective on the reference ann is the main causation that causes the conicoid error. The plane sample was selected as the sample in experiment and was measured when the objective on the reference ann was moved axially to different position. Through analyzing the outcome of measurement, the effect on measure error of system which was caused by the focus axial error of the objective was verified and was compared with the theoretic analysis.

关 键 词： 林尼克结构干涉测量系统 系统测量误差 焦点轴向误差 相移器误差 摄像机误差

领　　域： [理学] [理学] [一般工业技术]