作　　者： ; ; ;

机构地区： 华南师范大学物理与电信工程学院

出　　处： 《物理实验》 2008年第2期5-7,13,共4页

摘　　要： 将干涉显微镜的应用推广到透明薄膜厚度的测量,扩展了干涉显微镜的测量范围和应用领域.基于菲涅耳公式,分析了透明薄膜界面的反射.根据白光干涉原理,利用圆形样品台的定量移动,实现了薄膜厚度的测量. The interference microscope has been applied to the measurement of the transparent thin film thickness, thus the measurement range and the application field of the interference microscope have been expanded. Basing on Freshnel formula, the reflection on the interfaces of the trans-parent thin film has been analyzed. According to the principle of white light interference, the measurement of the film thickness is realized by using the quantitative movements of the circular sample holder.

关 键 词： 干涉显微镜 白光干涉 透明薄膜 厚度

领　　域： [机械工程] [理学] [理学]