作　　者： ; ; ; ;

机构地区： 天津师范大学物理与电子信息学院

出　　处： 《材料研究学报》 2007年第6期627-631,共5页

摘　　要： 使用超高真空离子束辅助沉积系统(IBAD)制备一系列具有纳米调制周期的ZrN/TiAlN多层膜,研究了离子辅助轰击对薄膜性能的影响.结果表明:离子辅助轰击使大部分ZrN/TiAlN多层膜的纳米硬度和弹性模量值高于两种个体材料硬度的平均值;离子的轰击和薄膜表面原子与轰击离子之间的动量传输提高了薄膜的致密度;当轰击能量为200 eV时,多层膜的硬度最高(30.6 GPa),弹性模量、表面粗糙度和摩擦系数等也明显改善. ZrN/TiAlN multilayered coatings with nanoscale bilayer were synthesized by ion beam assisted deposition （IBAD）. XRD, nano indenter, and multi-functional tester for material surface proper- ties were employed to investigate the effect of ion bombarding energy on microstructure and mechanical properties of the coatings. All multilayered coatings almost reveal higher hardness and elastic modulus than the rule-of-mixtures value of monolithic ZrN and TiAlN coatings. At bombarding energy of 200 eV, the momentum transfer between surface atoms and bombarding ions causes an increase in the areal density of multilayered coating due to ion bombarding. ZrN/TiAlN multilayered coating prepared at this bombarding energy possesses the highest hardness （30.6 GPa）. Its elastic modulus, surface roughness and friction coefficient are also improved obviously.

关 键 词： 无机非金属材料 离子束辅助沉积 纳米多层膜 硬度 辅助轰击能量

领　　域： [一般工业技术]